DRY ETCHER
Hole Pattern
Cross-view of MESA etching
Silicon 20nm Silp Line Etching
Cross-view of Poly Silicon Etching
Cross-view of Silicon Etching
Trench Pattern
PERI - R Series
SPECIFICATIONS
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Application : Metal & Dielectric material etching
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Etching material : SiO2, Si3N4, Si, Al, GaN, HfO2, Al2O3,Graphene,…
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Substrate size : Piece ~ 12inch
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Product yield : 1(one) wafer/run
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Source(gas) injection type : Dual patterned showerhead type
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Power supply : RF power Max. 2Kw@13.56MHz (with RF matching network)
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Ultimate pressure : < 5.0E-3 Torr
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Pressure control : Auto pressure control (throttle valve, baratron gauge)
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Gas delivery : SF6, CHF3, CF4, C4F8, BCl3,Cl2O2, Ar, He,…
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Vacuum pump : Dry pump or Rotary pump
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Control : PC control (UPRO software)
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Option : TMP, Loadlock chamber
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System dimension (W*D*H) : 800mm X 880mm X 1,200mm
PERI - L SERIES
SPECIFICATIONS
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Application : Metal & Dielectric material etching
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Etching material : SiO2, Si3N4, Si, Al, GaN, HfO2, Al2O3,Graphene,…
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Substrate size : Piece ~ 12inch
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Product yield : 15 wafers/run
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Source(gas) injection type : Dual patterned showerhead type
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Power supply : RF power Max. 2Kw@13.56MHz (with RF matching network)
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Ultimate pressure : < 5.0E-3 Torr
-
Pressure control : Auto pressure control (throttle valve, baratron gauge)
-
Gas delivery : SF6, CHF3, CF4, C4F8, BCl3,Cl2O2, Ar, He,…
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Vacuum pump : Dry pump or Rotary pump
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Control : PC control (UPRO software)
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Option : TMP, Loadlock chamber
PERI - ICP SERIES
SPECIFICATIONS
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Etching material : Metal & Dielectric material etching
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Substrate size : Max. 8inch
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Product yield : 1(one) wafer/run
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Source(gas) injection type : Showerhead type
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Chuck Unit : Chuck cooling by chiller
Substrate back side He cooling
Mechanical wafer chucking with clamp -
Power supply : Bias : RF power Max.2kW@13.56MHz
ICP source : RF power Max.3kW@13.56MHz -
Ultimate pressure : < 5.0E-6 Torr (TMP & Dry pump)
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Pressure control : Pendulum valve, baratron gauge
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Gas delivery : SF6, CHF3, CF4, C4F8, BCl3,Cl2O2, Ar, He,…
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Control : PC control (UPRO software)
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Option : TMP, Loadlock chamber
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System dimension (W*D*H) : 2,050mm X 800mm X 1,600mm