GLOVEBOX+PVD
Perovskite deposition process
Process Data : Perovskite Solarcell
-
Substrate size : 140mm × 140mm
-
Process pressure : 5.0E-07Torr
PbI2 → MAI : perovskite deposition test data
C60 deposition test data
-
Substrate size : 140mm × 140mm
-
Process pressure : 5.0E-07Torr
BCP deposition test data
PbI2 deposition (dep-rate 0.1Å/sec) + MAI deposition
PbI2 deposition test data
GLOVEPV - R
SPECIFICATIONS
-
Application : Alq3, CuPc, NPD, LiF, C60, BCP, PbI2, MAI, Ag, SnO2, MoO,WO, NiO,..
Al, Au, Ag,… -
Substrate size & Load capacity : 200mm×200mm & 1sample/run
-
Process chamber : Organic Chamber
Metal Chamber
Perovskite Chamber
Glovebox -
Substrate rotation : 0 to 20 rpm
-
Substrate holder : Rotation and heating
-
No of effusion cell : 2 to 6ea, Middle temperature 650℃
-
No of boats : 2 to 6 ea
-
Thickness controller : Q’tz crystal sensor & controller
-
Ultimate pressure : < 5.0E-7 Torr (Cryo pump or TMP)
-
Option : Co-evaporation,
-
Control : Manual control or PC control
GLOVEPV - S
SPECIFICATIONS
-
Application : Alq3, CuPc, NPD, LiF, C60, BCP, PbI2, MAI, Ag, SnO2, MoO,WO, NiO,..
Al, Au, Ag,… -
Substrate size & Load capacity : Max. 400mm×400mm & 1sample/run
-
Process chamber : Organic Chamber
Metal Chamber
Perovskite Chamber
Glovebox -
Substrate rotation : 0 to 20 rpm
-
Substrate holder : Rotation and heating
-
No of effusion cell : 2 to 6ea, Middle temperature 650℃
-
No of boats : 2 to 6 ea
-
Thickness controller : Q’tz crystal sensor & controller
-
Ultimate pressure : < 5.0E-7 Torr (Cryo pump or TMP)
-
Option : Co-evaporation,
-
Control : Manual control or PC control
GLOVEPV - C
SPECIFICATIONS
-
Application : Alq3, CuPc, NPD, LiF, C60, BCP, PbI2, MAI, Ag, SnO2, MoO,WO, NiO,..
Al, Au, Ag,… -
Substrate size & Load capacity : 200mm×200mm & 1sample/run
-
Process chamber : Organic Chamber
Metal Chamber
Perovskite Chamber
Glovebox -
Substrate rotation : 0 to 20 rpm
-
Substrate holder : Rotation and heating
-
No of effusion cell : 2 to 6ea, Middle temperature 650℃
-
No of boats : 2 to 6 ea
-
Thickness controller : Q’tz crystal sensor & controller
-
Ultimate pressure : < 5.0E-7 Torr (Cryo pump or TMP)
-
Option : Co-evaporation,
-
Control : Manual control or PC control