VACUUM SINTERING FURNACE
Hardware Data
MOON series (Cu & Ag SEM Images
Cooling test
Process Recipe
BRAZ - V
SPECIFICATIONS
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Process : Brazing
Metal annealing
Vacuum diffusion
Sintering -
Chamber material : SUS304
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Heating element : Graphite heater
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Substrate heater temperature : 1,350℃
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Heating zone : 48L (326mm(W)*326mm(D)*450mm(H))
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Cooling zone : Cool down rate : 1,100℃→200℃ / 20min
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Ultimate pressure : < 5.0×10-6 Torr
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Pump : Diffusion + Rotary pump
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Loading & cooling chamber :
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Gas Supply : Ar (extensible)
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Temperature uniformity : < ±3℃ @1,000℃
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System control : PC control (full auto)
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Dimension (w*d*h) : 2,000mm*650mm*1,400mm
BRAZ - H
SPECIFICATIONS
-
Process : Brazing
Metal annealing
Vacuum diffusion
Sintering -
Chamber material : SUS304
-
Heating element : Graphite heater
-
Substrate heater temperature : 1,350℃
-
Heating zone : > 250mm x 250mm x 400 mm
-
Ultimate pressure : < 5.0×10-6 Torr
-
Pump : Diffusion + Rotary pump
-
Gas Supply : Ar (extensible)
-
System control : PC control (full auto)
-
Dimension (w*d*h) : 2,000mm*650mm*1,400mm